MICROMECHANICAL ROTATION RATE SENSOR WITH A COUPLING BAR AND SUSPENSION SPRING ELEMENTS FOR QUADRATURE SUPPRESSION
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Abstract
A micromechanical rotation rate sensor including at least one substrate, wherein the base surface of the substrate is oriented parallel to the x-y plane of a Cartesian coordinate system, at least two seismic masses and in each case at least one suspension spring element for suspending the seismic mass from the substrate, wherein the at least two seismic masses are coupled to one another by at least one coupling bar, and at least one of the suspension spring elements includes at least two bar sections, which, in the undeflected state, are oriented essentially parallel to one another or are at an angle of less than 45° with respect to one another, and one or more connecting sections, which connect the bar sections to one another, wherein the bar sections can be displaced relative to one another in their longitudinal direction.
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Citations
46 Claims
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1-21. -21. (canceled)
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22. A micromechanical rotation rate sensor comprising:
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at least one substrate, wherein a base surface of the substrate is oriented parallel to an x-y plane of a Cartesian coordinate system; and at least two seismic masses and, in each case, at least one suspension spring element for suspending the seismic mass from the substrate; at least one coupling bar for coupling the at least two seismic masses to one another; wherein at least one of the suspension spring elements comprises at least two bar sections, which, in an undeflected state, are oriented substantially parallel to one another or are oriented at an angle of less than 45°
with respect to one another, and one or more connecting sections, which connect the bar sections to one another;wherein the bar sections can be displaced relative to one another in their longitudinal direction. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46)
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Specification