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MICROMECHANICAL ROTATION RATE SENSOR WITH A COUPLING BAR AND SUSPENSION SPRING ELEMENTS FOR QUADRATURE SUPPRESSION

  • US 20100186507A1
  • Filed: 08/18/2008
  • Published: 07/29/2010
  • Est. Priority Date: 09/10/2007
  • Status: Active Grant
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1-21. -21. (canceled)

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