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INERTIAL OR RESONATING SENSOR IN SURFACE TECHNOLOGY, WITH OUT OF PLANE DETECTION BY STRAIN GAUGE

  • US 20100186510A1
  • Filed: 01/22/2010
  • Published: 07/29/2010
  • Est. Priority Date: 01/23/2009
  • Status: Active Grant
First Claim
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1. MEMS surface type sensor, made in a substrate the surface of which defines a plane, known as substrate plane, this sensor comprising:

  • a) a first zone, called thick zone, having a first thickness (T), of which two surfaces form a first plane (N1) and a second plane (N2) parallel in relation to one another and to the plane of the substrate, this zone forming at least one mobile mass with movement outside the plane of the substrate,b) a second zone, linked to a fixed zone of the substrate, this second zone forming at least a pivot link of the mobile mass in relation to said substrate, and having a thickness less or equal to that of the mobile mass and being linked to it, the axis (H) of the pivot link being placed between the first plane (N1) and the second plane (N2), and parallel to each of them, this second zone having, along a direction perpendicular to the substrate plane, a lower part and an upper part, at least one of these parts being in the first plane (N1) or in the second plane (N2), known as plane common to the first and second zones,c) a third zone, called thin zone area, of a lesser thickness than that of the second zone, forming at least a suspended type strain gauge, for the detection of the movement of the mobile mass around the axis of the pivot link, this third zone having, along a direction perpendicular to the substrate plane, a lower part and an upper part, one of these parts being in the plane common to the first and second zones, and this third zone;

    extending in a plane parallel to the substrate plane not containing the axis of the pivot link,extending perpendicularly to the rotation axis of the pivot link,being linked to the mobile mass on the one side and to the substrate on the other.

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