ATOMIC LAYER DEPOSITION APPARATUS
First Claim
1. An atomic layer deposition apparatus, comprising:
- a loading/unloading module for loading/unloading a substrate;
a process module including a plurality of process chambers for simultaneously receiving a plurality of substrates and performing a deposition process, each of the plurality of process chambers including a gas spraying unit having an exhaust portion by which an exhaust gas is drawn in from inside the process chamber and the drawn in gas is exhausted above the process chamber; and
a transfer module including a transfer robot provided between the loading/unloading module and the process module, the transfer robot being adapted for simultaneously holding the plurality of substrates while transporting the plurality of substrates.
3 Assignments
0 Petitions
Accused Products
Abstract
An atomic deposition apparatus is provided for simultaneously loading/unloading a plurality of substrates. The atomic deposition apparatus which may load/unload the plurality of substrates when transmitting the plurality of substrates to a process module, includes a loading/unloading module for loading/unloading a substrate, a process module including a plurality of process chambers for simultaneously receiving a plurality of substrates and performing a deposition process, each of the plurality of process chambers including a gas spraying unit having an exhaust portion by which an exhaust gas is drawn in from inside the process chamber and the drawn in gas is exhausted above the process chamber, and a transfer module including a transfer robot provided between the loading/unloading module and the process module, the transfer robot being adopted for simultaneously holding the plurality of substrates while transporting the substrate.
-
Citations
19 Claims
-
1. An atomic layer deposition apparatus, comprising:
-
a loading/unloading module for loading/unloading a substrate; a process module including a plurality of process chambers for simultaneously receiving a plurality of substrates and performing a deposition process, each of the plurality of process chambers including a gas spraying unit having an exhaust portion by which an exhaust gas is drawn in from inside the process chamber and the drawn in gas is exhausted above the process chamber; and a transfer module including a transfer robot provided between the loading/unloading module and the process module, the transfer robot being adapted for simultaneously holding the plurality of substrates while transporting the plurality of substrates. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
-
Specification