RETICLE ERROR REDUCTION BY COOLING
First Claim
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1. An apparatus for providing top side cooling to a reticle, the apparatus comprising:
- a heat exchanger arrangement, the heat exchanger arrangement including a first surface, the first surface being arranged to facilitate heat transfer between the reticle and the heat exchanger arrangement, the heat transfer being arranged to cool at least some portions of the reticle; and
an actuator, the actuator being arranged to position the first surface of the heat exchanger arrangement at a distance over the reticle.
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Abstract
Methods and apparatus for cooling a reticle are disclosed. According to one aspect of the present invention, an apparatus for providing top side cooling to a reticle includes a heat exchanger arrangement and an actuator. The heat exchanger arrangement includes a first surface arranged to facilitate heat transfer between the reticle and the heat exchanger arrangement. The heat transfer provides cooling to at least some portions of the reticle. The actuator positions the first surface of the heat exchanger arrangement at a distance over the reticle.
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Citations
35 Claims
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1. An apparatus for providing top side cooling to a reticle, the apparatus comprising:
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a heat exchanger arrangement, the heat exchanger arrangement including a first surface, the first surface being arranged to facilitate heat transfer between the reticle and the heat exchanger arrangement, the heat transfer being arranged to cool at least some portions of the reticle; and an actuator, the actuator being arranged to position the first surface of the heat exchanger arrangement at a distance over the reticle. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A cooling device suitable for providing top side cooling to a reticle, the cooling device comprising:
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a heat exchanger, the heat exchanger being arranged to absorb heat associated with the reticle; a sensing arrangement, the sensing arrangement being configured to obtain at least one temperature; and a heating arrangement, the heating arrangement being coupled to the heat exchanger, the heating arrangement having a plurality of heating elements and a first arrangement, the first arrangement being arranged to individually control each heating element of the plurality of heating elements based on the at least one temperature. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 34, 35)
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28. A method for cooling a reticle, the method comprising:
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identifying at least one zone associated with the reticle; determining if a temperature associated with the at least one zone indicates that the at least one zone is to be cooled; activating a first heating element associated with the at least one zone if it is determined that the at least one zone is not to be cooled, wherein activating the first heating element compensates for cooling provided by a heat exchanger; and cooling the at least one zone using the heat exchanger if it is determined that the at least one zone is to be cooled. - View Dependent Claims (29, 30, 31, 32, 33)
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Specification