Microfabricated Elastomeric Valve And Pump Systems
First Claim
1. A composite structure comprising:
- a nonelastomer substrate having a surface bearing a first recess;
a flexible elastomer membrane with a Young'"'"'s Modulus between about 50 Pa and about 10 MPa overlying the non-elastomer substrate, the membrane able to be actuated into the first recess; and
a layer overlying the flexible elastomer membrane.
2 Assignments
0 Petitions
Accused Products
Abstract
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
206 Citations
30 Claims
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1. A composite structure comprising:
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a nonelastomer substrate having a surface bearing a first recess; a flexible elastomer membrane with a Young'"'"'s Modulus between about 50 Pa and about 10 MPa overlying the non-elastomer substrate, the membrane able to be actuated into the first recess; and a layer overlying the flexible elastomer membrane. - View Dependent Claims (2, 3, 4, 5)
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6. A composite structure comprising:
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an elastomer component with a Young'"'"'s Modulus between about 50 Pa and about 10 MPa including at least one of a recess and a flexible membrane portion; and a substantially planar nonelastomer component sealed against the elastomer component, the nonelastomer component including an active device interacting with at least one of the membrane portion and a material present in the recess. - View Dependent Claims (7, 8, 9, 10)
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11. A method of fabricating a composite structure comprising:
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forming a recess in an elastomer component, wherein the elastomer component has a Young'"'"'s Modulus between about 50 Pa and about 10 MPa; forming a substantially planar nonelastomer component including an active device; and sealing the elastomer component against the nonelastomer component, such that the active device may interact with at least one of a flexible membrane portion of the elastomer component and a material present within the recess. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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20. A method of microfabricating an elastomeric structure, the method comprising:
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microfabricating a first elastomeric layer with a Young'"'"'s Modulus between about 50 Pa and about 10 MPa including a recess-bearing face and a non-recess-bearing face; microfabricating a second elastomeric layer including a recess-bearing face and a non-recess-bearing face; placing the first elastomeric layer against the second elastomeric layer; and bonding the first elastomeric layer to the second elastomeric layer. - View Dependent Claims (21, 22, 23)
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24. A method of forming a composite structure comprising:
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forming a recess in a first nonelastomer substrate; filling the recess with a sacrificial material; forming a thin coat of elastomer material with a Young'"'"'s Modulus between about 50 Pa and about 10 MPa over the nonelastomer substrate and the filled recess; curing the elastomer to form a thin membrane; and removing the sacrificial material. - View Dependent Claims (25, 26, 27, 28, 29, 30)
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Specification