MICROELECTRONIC SENSOR DEVICE WITH LIGHT SOURCE AND LIGHT DETECTOR
First Claim
1. A microelectronic sensor device for optical examinations in an investigation region (3) of a carrier (5), comprisinga) a light source (20) for emitting an input light beam (L1) with a time-varying characteristic parameter towards the investigation region (3);
- b) a light detector (30) for providing a measurement signal (X) that is correlated to the characteristic parameter of an output light beam (L2) coming from the investigation region (3);
c) an evaluation unit (40, 140, 240) that provides a result signal (R) based on the characteristic parameters of the input light beam (L1) and the output light beam (L2).
1 Assignment
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Accused Products
Abstract
The invention relates to a method and a microelectronic sensor device for making optical examinations in an investigation region (3). An input light beam (L1) is emitted by a light source (20) into said investigation region (3), and an output light beam (L2) coming from the investigation region (3) is detected by a light detector (30) providing a measurement signal (X). An evaluation unit (40) provides a result signal (R) based on a characteristic parameter (e.g. the intensity) of the input light beam (L1) and the output light beam (L2). Preferably, the input light beam (L1) is modulated with a given frequency (ω) and monitored with a sensor unit (22) that provides a monitoring signal (M). The monitoring signal (M) and the measurement signal (X) can then be demodulated with respect to the monitoring signal, and their ratio can be determined. This allows to obtain a result signal (R) that is largely independent of environmental influences and variations in the light source.
46 Citations
15 Claims
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1. A microelectronic sensor device for optical examinations in an investigation region (3) of a carrier (5), comprising
a) a light source (20) for emitting an input light beam (L1) with a time-varying characteristic parameter towards the investigation region (3); -
b) a light detector (30) for providing a measurement signal (X) that is correlated to the characteristic parameter of an output light beam (L2) coming from the investigation region (3); c) an evaluation unit (40, 140, 240) that provides a result signal (R) based on the characteristic parameters of the input light beam (L1) and the output light beam (L2). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 15)
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14. A method for making optical examinations in an investigation region (3) of a carrier (5), comprising
a) emitting an input light beam (L1) with a time-varying characteristic parameter towards the investigation region (3); -
b) providing a measurement signal (X) that is correlated to the characteristic parameter of an output light beam (L2) coming from the investigation region (3); c) providing a result signal (R) based on the characteristic parameters of the input light beam (L1) and the output light beam (L2).
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Specification