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ULTRA LOW PRESSURE SENSOR AND METHOD OF FABRICATION OF SAME

  • US 20100187646A1
  • Filed: 10/10/2007
  • Published: 07/29/2010
  • Est. Priority Date: 10/11/2006
  • Status: Active Grant
First Claim
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1. A sensor including:

  • a backplate including a plurality of backplate holes;

    a diaphragm of electrically conductive or semi-conductive material that is connected to, and insulated from the backplate, the diaphragm defining a flexible member and an air gap associated with the flexible member;

    a bond pad formed on an area of the back plate surrounding the cavity; and

    a bond pad formed on an area of the diaphragm surrounding the air gap;

    wherein the flexible member and air gap defined by the diaphragm extend beneath the plurality of backplate holes.

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