On-Chip Heat Spreader
First Claim
Patent Images
1. A semiconductor die comprising:
- a semiconductor substrate;
at least one transistor formed in the semiconductor substrate;
an interconnect metal feature in an inter-metal dielectric (IMD) layer on a front-side surface of the semiconductor substrate the interconnect metal feature being coupled to the at least one transistor;
a dielectric layer on the IMD layer;
a bonding pad formed in the dielectric layer electrically coupled to the at least one transistor through the interconnect metal feature; and
a heat spreader formed in the first dielectric layer, the heat spreader being insulated from the bonding pad and including an elongate structure having at least one major axis extending from a center region of the front-side surface of the semiconductor substrate toward an outer edge of the front-side surface of the semiconductor substrate.
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Abstract
A three dimensional (3D) stacked chip structure with chips having on-chip heat spreader and method of forming are described. A 3D stacked chip structure comprises a first die having a first substrate with a dielectric layer formed on a front surface. One or more bonding pads and a heat spreader may be simultaneously formed in the dielectric layer. The first die is bonded with corresponding bond pads on a surface of a second die to form a stacked chip structure. Heat generated in the stacked chip structure may be diffused to the edges of the stacked chip structure through the heat spreader.
116 Citations
20 Claims
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1. A semiconductor die comprising:
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a semiconductor substrate; at least one transistor formed in the semiconductor substrate; an interconnect metal feature in an inter-metal dielectric (IMD) layer on a front-side surface of the semiconductor substrate the interconnect metal feature being coupled to the at least one transistor; a dielectric layer on the IMD layer; a bonding pad formed in the dielectric layer electrically coupled to the at least one transistor through the interconnect metal feature; and a heat spreader formed in the first dielectric layer, the heat spreader being insulated from the bonding pad and including an elongate structure having at least one major axis extending from a center region of the front-side surface of the semiconductor substrate toward an outer edge of the front-side surface of the semiconductor substrate. - View Dependent Claims (2, 3, 4, 5)
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6. A stacked chip structure comprising;
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a first semiconductor die, the first semiconductor die comprising a first bonding pad on a first dielectric layer on a front-side surface, a through-silicon via (TSV) extending through the first semiconductor die, the TSV being coupled to the first bonding pad, and a first heat spreader on the first dielectric layer, the first heat spreader being insulated from the TSV and the first bonding pad and having at least one major axis extending along the front-side surface; and a second semiconductor die attached to the first semiconductor die, the second semiconductor die comprising a second bonding pad on a second dielectric layer on a front-side surface of the second semiconductor die, wherein the second bonding pad is electrically connected to the first bonding pad. - View Dependent Claims (7, 8, 9, 10, 11, 12)
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13. An electronic package comprising:
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a packaging substrate; a first semiconductor die on the packaging substrate, the first semiconductor die comprising a first bonding pad on a first dielectric layer on a front-side surface of the first semiconductor die, a bonding pad on a second dielectric layer on a back-side surface of the first semiconductor die, a through-silicon via (TSV) coupled to the one first and the second bonding pads, respectively, and a first heat spreader on the first dielectric layer, the first heat spreader being insulated from the first bonding pads and the TSV; a second semiconductor die on the first semiconductor die, the second semiconductor die having a bonding pad on a third dielectric layer on a front-side surface of the second semiconductor die, wherein the second semiconductor die is electrically coupled to the first semiconductor die via the third bonding pad and the first bonding pad; and a package housing filled with a thermal conducting medium, the thermal conducting medium contacting the first heat spreader. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification