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TOTAL INTERNAL REFLECTION DISPLACEMENT SCALE

  • US 20100188668A1
  • Filed: 06/18/2008
  • Published: 07/29/2010
  • Est. Priority Date: 06/19/2007
  • Status: Abandoned Application
First Claim
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1. A method of determining displacement of a substrate, comprising:

  • directing light toward a scale disposed on the substrate, the scale comprising a plurality of total internal reflection (TIR) prisms as scale elements;

    modulating the light using the TIR prisms; and

    generating a signal based on the modulated light, the signal indicating the substrate displacement.

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