CAPACITOR MICROPHONE CHIP, CAPACITOR MICROPHONE, AND MANUFACTURING METHOD THEREOF
First Claim
1. A capacitor microphone chip wherein a vibration membrane as a movable electrode and a fixed electrode provided so as to be opposed to the vibration membrane with an air gap therebetween and having a sound hole are formed on a silicon substrate, and a back air chamber is formed by removing a part of the silicon substrate so as to expose a back side of the vibration membrane, whereinthe silicon substrate is shaped almost like a regular hexagon.
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Accused Products
Abstract
An object of the invention is to design microminiaturization and higher sensitivity of a capacitor microphone chip formed by micromachining a silicon substrate and a wafer is diced so that a silicon substrate of a microphone chip is shaped almost like a hexagon, preferably a regular hexagon, and a back air chamber is shaped like a circle or a regular hexagon.
16 Citations
9 Claims
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1. A capacitor microphone chip wherein a vibration membrane as a movable electrode and a fixed electrode provided so as to be opposed to the vibration membrane with an air gap therebetween and having a sound hole are formed on a silicon substrate, and a back air chamber is formed by removing a part of the silicon substrate so as to expose a back side of the vibration membrane, wherein
the silicon substrate is shaped almost like a regular hexagon.
Specification