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Controlling a Manufacturing Process with a Multivariate Model

  • US 20100191361A1
  • Filed: 01/23/2009
  • Published: 07/29/2010
  • Est. Priority Date: 01/23/2009
  • Status: Active Grant
First Claim
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1. A computer-implemented method for controlling a manufacturing process, the method comprising:

  • receiving dependent variable data measured during the manufacturing process, the dependent variable data representative of values of a first set of process parameters observed by one or more sensors;

    receiving manipulated variable data measured during the manufacturing process from a plurality of process tools and predicted manipulated variable data representative of a second set of process parameters.determining at least one of a predicted score value, a multivariate statistic, or both based on at least the received data; and

    determining operating parameters of the manufacturing process based on at least the predicted score value, the multivariate statistic, or both.

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