MICROMECHANICAL STRUCTURES
First Claim
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1. A micromechanical structure comprising:
- a substrate having a main plane of extension; and
a first seismic mass including a grid structure made of intersecting first mass lines, the first mass lines including first mass lines parallel to the main plane of extension and the first seismic mass being flexibly secured by first bending-spring elements, the first bending-spring elements including first bending-spring elements parallel to the main plane of extension, wherein a first line width of the first mass lines parallel to the main plane of extension is between 20 and 50 percent of a further first line width of the first bending-spring elements parallel to the main plane of extension.
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Abstract
A micromechanical structure including a substrate having a main plane of extension, and including a first seismic mass, the first seismic mass including a grid structure made of intersecting first mass lines and the first seismic mass being flexibly secured with the aid of first bending-spring elements, and moreover, a first line width of the first mass lines parallel to the main plane of extension being between 20 and 50 percent of a further first line width of the first bending-spring elements parallel to the main plane of extension.
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Citations
16 Claims
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1. A micromechanical structure comprising:
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a substrate having a main plane of extension; and a first seismic mass including a grid structure made of intersecting first mass lines, the first mass lines including first mass lines parallel to the main plane of extension and the first seismic mass being flexibly secured by first bending-spring elements, the first bending-spring elements including first bending-spring elements parallel to the main plane of extension, wherein a first line width of the first mass lines parallel to the main plane of extension is between 20 and 50 percent of a further first line width of the first bending-spring elements parallel to the main plane of extension. - View Dependent Claims (2)
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- 3. The micromechanical structure as recited in claim 3, wherein the first line width is between 30 and 36 of the further first line width.
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5. A yaw-rate sensor, comprising:
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a substrate having a main plane of extension; a first sensing-mass element and a second sensing-mass element, the first sensing-mass element being excitable by a first driving element into a first oscillation parallel to the main plane of extension, the second sensing-mass element being excitable by a second driving element into a second oscillation anti-parallel to the first oscillation, a first Coriolis displacement of the first sensing-mass element along a third direction perpendicular to the main plane of extension being detectable by a first sensing element, a second Coriolis displacement of the second sensing-mass element along the third direction being detectable by a second sensing means, and the first and second sensing-mass elements being coupled to each other by a first coupling element, wherein the first sensing-mass element is a first rocker structure and the second sensing element is a second rocker structure. - View Dependent Claims (6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification