MULTI-WORKPIECE PROCESSING CHAMBER AND WORKPIECE PROCESSING SYSTEM INCLUDING THE SAME
First Claim
1. A multi-workpiece processing chamber comprising:
- a chamber housing which forms at least two internal processing spaces therein;
at least one partition member which is provided in the chamber housing and partitions the chamber housing into at least two internal processing spaces; and
the respective internal processing spaces being coupled with the partition member and having a symmetric shape to generate a processing reaction uniformly.
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Abstract
A multi-workpiece processing chamber according to the present invention comprises a chamber housing which forms at least two internal processing spaces therein; at least one partition member which is provided in the chamber housing and partitions the chamber housing into at least two internal processing spaces; and the respective internal processing spaces being coupled with the partition member and having a symmetric shape to generate a processing reaction uniformly. The multi-workpiece processing chamber according to the present invention has internal processing spaces that have a symmetric shape by being coupled with a partition member. Thus, a processing reaction uniformly occurs across the internal processing areas and reproducibility and uniformity of a workpiece processing process may improve.
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Citations
16 Claims
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1. A multi-workpiece processing chamber comprising:
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a chamber housing which forms at least two internal processing spaces therein; at least one partition member which is provided in the chamber housing and partitions the chamber housing into at least two internal processing spaces; and the respective internal processing spaces being coupled with the partition member and having a symmetric shape to generate a processing reaction uniformly. - View Dependent Claims (2, 3, 4)
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5. A multi-workpiece processing system comprising:
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at least one multi-workpiece processing chamber which has a plurality of internal processing spaces partitioned by a partition member; a transfer chamber, in a circumferential area of which is disposed at least one multi-workpiece processing chamber; and a workpiece transfer unit which is provided in the transfer chamber and transfers a workpiece to the internal processing spaces of the multi-workpiece processing chamber. - View Dependent Claims (6, 7, 8, 9, 10, 11)
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12. A multi-workpiece processing chamber comprising:
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a plurality of internal processing spaces which comprises a workpiece support; a first gas supply ratio controller which controls a supply ratio of a gas supplied from a gas supply source to the plurality of internal processing spaces; and a second gas supply ratio controller which is provided between the first gas supply ratio controller and the respective internal processing spaces and divides the gas supplied to the internal processing spaces and supplies gas to at least two divided parts of the internal processing spaces. - View Dependent Claims (13, 14, 15, 16)
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Specification