×

Lamp system producing uniform high intensity ultraviolet light for exposure of photolithographic and other light polymerizable materials

  • US 20100193674A1
  • Filed: 02/03/2009
  • Published: 08/05/2010
  • Est. Priority Date: 02/03/2009
  • Status: Abandoned Application
First Claim
Patent Images

1. A lamp system comprising:

  • a plurality of lamps generating light in an ultraviolet spectrum range;

    a separate reflector associated with and covering each of the plurality of lamps, forming distinct lamp and reflector pairs, such that each lamp reflector pair has a generally separate reflective light path to a surface of a substrate;

    at least one capacitor connected to each lamp to store energy to energize the lamp; and

    a triggering and control circuit to trigger the at least one capacitor connected to each lamp independently, such that each lamp can be controlled separately with respect to illumination time and intensity.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×