Semiconductor device
First Claim
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1. A semiconductor device comprising:
- a semiconductor layer made of SiC;
an impurity region formed by doping the semiconductor layer with an impurity; and
a contact wire formed on the semiconductor layer in contact with the impurity region, whereinthe contact wire has a polysilicon layer in the portion in contact with the impurity region, and has a metal layer on the polysilicon layer.
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Abstract
The semiconductor device according to the present invention includes: a semiconductor layer made of SiC; an impurity region formed by doping the semiconductor layer with an impurity; and a contact wire formed on the semiconductor layer in contact with the impurity region, while the contact wire has a polysilicon layer in the portion in contact with the impurity region, and has a metal layer on the polysilicon layer.
52 Citations
7 Claims
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1. A semiconductor device comprising:
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a semiconductor layer made of SiC; an impurity region formed by doping the semiconductor layer with an impurity; and a contact wire formed on the semiconductor layer in contact with the impurity region, wherein the contact wire has a polysilicon layer in the portion in contact with the impurity region, and has a metal layer on the polysilicon layer. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification