MEMS DEVICES AND SYSTEMS ACTUATED BY AN ENERGY FIELD

• US 20100194237A1
• Filed: 04/17/2008
• Published: 08/05/2010
• Est. Priority Date: 04/17/2007
• Status: Active Grant

• Current Assignee: University of Utah Research Foundation (State of Utah)
• Original Assignee: University of Utah Research Foundation (State of Utah)
• Inventors: Harvey, Iain E., Harvey, Ian R., Boutte, Ronald W., Baker, Brian W., Meacham, Taylor M.
• Granted Patent: US 8,421,305 B2
• Time in Patent Office: Days
• US Class Current: 310/309
• CPC Class Codes: B81B 2201/038 Microengines and actuators not provided for in B81B2201/031 - B81B2201/037
• CPC Class Codes: B81B 2203/0118 Cantilevers
• CPC Class Codes: B81B 3/0029 Transducers for transforming light into mechanical energy or viceversa
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Abstract

A microelectromechanical system (MEMS) device includes an actuator having a plurality of charge collection elements. At least one of the charge collection elements is configured to build up electrical charges by directly interacting with an energy field thereby actuating the MEMS through Coulombic interactions. An actuator for a MEMS device is configured to actuate the MEMS device through Coulombic interactions by pumping charges to the actuator when subject to an energy field. A method of actuating a MEMS device includes irradiating an actuator of the MEMS device with an energy field thereby building up electrical charges on the actuator, and actuating the MEMS device with Coulomb forces from the built up electrical charges.

Claims

1. A microelectromechanical system (MEMS) device, comprising:

an actuator comprising a plurality of charge collection elements, wherein at least one of the charge collection elements is configured to build up electrical charges by directly interacting with an energy field thereby actuating the MEMS device through Coulombic interactions.

2. The MEMS device of claim 1, wherein the energy field interacts with the actuator through free space propagation.

3. The MEMS device of claim 1, wherein the energy field comprises at least one of an electron beam, a laser beam, a radiation beam, a charged particle beam, an uncharged particle beam, a photon beam, a static charge from triboelectric effect, and a discharge of a capacitor.

4. The MEMS device of claim 3, wherein the energy field comprises an electron beam from a scanning electron microscope (SEM), and wherein the electron beam causes electrical charges to build up on the at least one charge collection element.

5. The MEMS device of claim 1, wherein a first and a second of the plurality of charge collection elements are configured to have repulsive Coulombic interactions therebetween when interacting with the energy field.

6. The MEMS device of claim 5, wherein the actuator further comprises a third charge collection element configured to have attractive Coulombic interactions with at least one of the first and the second charge collection elements.

7. The MEMS device of claim 1, further comprising a substrate, wherein a first and second charge collection elements of the plurality of charge collection elements are electrically isolated from the substrate, and wherein the second charge collection element is configured to charge positively when interacting with the energy field.

8. The MEMS device of claim 7, wherein the second charge collection element has at least one of a dimension, a density, a coating, and a topography selected such that a relative excess of secondary electrons is produced relative to an electrical node, and the second charge collection element acts as a secondary-electron emitter.

9. The MEMS device of claim 8, wherein the first charge collection element is also a secondary-electron emitter such that the first charge collection element and the second charge collection element have repulsive Coulombic interactions therebetween when subject to the energy field.

10. The MEMS device of claim 9, wherein the first and second charge collection elements have a common electrical node.

11. The MEMS device of claim 9, further comprising a third charge collection element configured to have attractive Coulombic interactions with at least one of the first and second charge collection elements.

12. The MEMS device of claim 8, wherein the first charge collection element has at least one of a dimension, a density, a coating, and a topography selected such that a relative excess of secondary electrons is produced relative to an electrical node, and the first charge collection element acts as a primary electron trap such that the first and the second charge collection elements have attractive Coulombic interactions therebetween when subject to the energy field.

13. The MEMS device of claim 1, wherein the actuator further comprises a spring configured to provide a biasing or restoring force when at least one of the charge collection elements is grounded or shorted.

14. The MEMS device of claim 1, wherein at least two of the plurality of charge collection members have comb structures configured to increase an area of the Coulombic interactions therebetween.

15. An actuator for a microelectromechanical system (MEMS) device, comprising a plurality of charge collection elements configured to actuate the MEMS device through Coulombic interactions by pumping charges to the actuator when subject to an energy field.

16. The actuator of claim 15, wherein the energy field comprises an electron beam.

17. The actuator of claim 15, wherein the Coulombic interactions comprise at least one of a repulsive interaction and an attractive interaction.

18. A method of actuating a microelectromechanical system (MEMS) device, comprising:

irradiating an actuator of the MEMS device with an energy field thereby building up electrical charges on the actuator; and

actuating the MEMS device with Coulomb forces from the built up electrical charges.

19. The method of claim 18, wherein the energy field is irradiated onto the actuator through free space propagation.

20. The method of claim 18, wherein actuating the MEMS device with Coulomb forces comprises actuating the MEMS device with a combination of repulsive and attractive Coulombic interactions.