Plasma Supply Device
First Claim
1. A plasma supply device configured to generate an output power greater than 500 W at an essentially constant basic frequency of greater than 3 MHz for powering a plasma process to which the generated output power is supplied and from which reflected power is returned to the plasma supply device, the plasma supply device comprising:
- an inverter connected to a DC power supply, wherein the inverter has at least one switching element, andan output network electrically coupled to the inverter,wherein the output network includes an inductance that has a magnetic field strengthening element that is a Perminvar ferrite.
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Accused Products
Abstract
A plasma supply device generates an output power greater than 500 W at an essentially constant basic frequency greater than 3 MHz and powers a plasma process to which is supplied the generated output power, and from which reflected power is returned to the plasma supply device. The plasma supply device includes at least one inverter connected to a DC power supply, which inverter has at least one switching element, and an output network, wherein the at least one output network includes at least one inductance that has at least one magnetic field strengthening element that is a Perminvar ferrite.
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Citations
19 Claims
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1. A plasma supply device configured to generate an output power greater than 500 W at an essentially constant basic frequency of greater than 3 MHz for powering a plasma process to which the generated output power is supplied and from which reflected power is returned to the plasma supply device, the plasma supply device comprising:
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an inverter connected to a DC power supply, wherein the inverter has at least one switching element, and an output network electrically coupled to the inverter, wherein the output network includes an inductance that has a magnetic field strengthening element that is a Perminvar ferrite. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of providing power to a plasma process from a plasma supply device generating an output power greater than 500 W at an essentially constant basic frequency of greater than 3 MHz, from which process reflected power is returned to the plasma supply device, the method comprising:
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driving an inverter connected to a DC power supply, by driving at least one switching element, and directing power from the inverter to an output network, wherein the output network includes at least one inductance that has a magnetic field strengthening element that is a Perminvar ferrite, and wherein current through the inductance is limited so that magnetic field strength in the Perminvar ferrite is less than 50 percent of the coercive field strength of the Perminvar ferrite. - View Dependent Claims (19)
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Specification