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Plasma Supply Device

  • US 20100194280A1
  • Filed: 01/11/2010
  • Published: 08/05/2010
  • Est. Priority Date: 07/23/2007
  • Status: Active Grant
First Claim
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1. A plasma supply device configured to generate an output power greater than 500 W at an essentially constant basic frequency of greater than 3 MHz for powering a plasma process to which the generated output power is supplied and from which reflected power is returned to the plasma supply device, the plasma supply device comprising:

  • an inverter connected to a DC power supply, wherein the inverter has at least one switching element, andan output network electrically coupled to the inverter,wherein the output network includes an inductance that has a magnetic field strengthening element that is a Perminvar ferrite.

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