ACTIVE TEMPERATURE CONTROL OF PIEZOELECTRIC MEMBRANE-BASED MICRO-ELECTROMECHANICAL DEVICES
First Claim
Patent Images
1. An apparatus, comprising:
- a substrate;
a microelectronic ultrasonic transducer (MUT) disposed over the substrate; and
a thermoelectric device proximate to the MUT and configured to provide heat to or remove heat from the MUT.
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Accused Products
Abstract
In a representative embodiment, an apparatus, comprises a substrate; a microelectronic ultrasonic transducer (MUT) disposed over the substrate; and a thermoelectric device disposed proximate to the MUT and configured to provide heat to or remove heat from the MUT. A microelectromechanical MEMs device is also described.
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Citations
16 Claims
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1. An apparatus, comprising:
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a substrate; a microelectronic ultrasonic transducer (MUT) disposed over the substrate; and a thermoelectric device proximate to the MUT and configured to provide heat to or remove heat from the MUT. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A microelectromechanical (MEMs) device, comprising:
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a microelectronic ultrasonic transducer (MUT); and a thermoelectric device disposed proximate to the MUT and configured to provide heat to or remove heat from the MUT. - View Dependent Claims (9, 10, 11, 12)
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13. A MEMs device as claimed 8, further comprising a substrate, and the thermoelectric device is disposed over the substrate and between the substrate and the MUT.
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14. A MEMs device, comprising:
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an apparatus, comprising;
a microelectronic ultrasonic transducer (MUT); anda thermoelectric device disposed proximate to the MUT and configured to provide heat to or remove heat from the MUT; and a control unit configured to set and adjust an operating point of the thermoelectric device. - View Dependent Claims (15, 16)
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Specification