SYSTEMS AND METHODS FOR FABRICATING DISPLACEMENT SCALES
First Claim
1. A system for forming a displacement scale on a substrate, comprising:
- one or more rollers having total internal reflection (TIR) prism features in negative relief; and
a drive mechanism configured to rotate the rollers so that the displacement scale comprising the TIR prism features is formed on the substrate.
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Accused Products
Abstract
Methods and systems for forming a displacement scale comprising TIR prisms on a substrate are described. A system for forming the displacement scale includes one or more rollers having a pattern of total internal reflection (TIR) prism features in negative relief. As the rollers are rotated, the scale is formed on the substrate. The rollers may also include pattern features in negative relief. Rotation of the rollers simultaneously forms the displacement scale and the pattern features on the substrate. The TIR prism features of the displacement scale may be oriented to provide measurement of one or more of lateral displacement, longitudinal displacement and angular displacement.
121 Citations
28 Claims
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1. A system for forming a displacement scale on a substrate, comprising:
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one or more rollers having total internal reflection (TIR) prism features in negative relief; and a drive mechanism configured to rotate the rollers so that the displacement scale comprising the TIR prism features is formed on the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method of forming a displacement scale comprising TIR prism features on a substrate, comprising:
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bringing the substrate into contact or close proximity with the one or more rollers having total internal reflection (TIR) prism features in negative relief; and rotating the rollers relative to the substrate so that the displacement scale comprising TIR prism features is formed on a surface of the substrate. - View Dependent Claims (20, 21, 22, 23)
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- 24. A tool configured to form a scale on a substrate, the tool comprising a roller having total internal reflection (TIR) prism features arranged and pattern features in negative relief, the roller configured to simultaneously form a scale, comprising TIR prism features, and pattern features on a substrate when the roller is brought into contact or close proximity with the substrate.
Specification