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METHOD FOR GENERATING HIGH RESOLUTION SURFACE TOPOLOGY MAP USING SURFACE PROFILING AND SURVEYING INSTRUMENTATION

  • US 20100198517A1
  • Filed: 03/23/2009
  • Published: 08/05/2010
  • Est. Priority Date: 02/02/2009
  • Status: Active Grant
First Claim
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1. A method for generating a surface topology map of a surface, comprising:

  • collecting a plurality of survey sample points of the surface;

    collecting a plurality of profile sample points of the surface;

    correlating the profile sample points with the survey sample points in the Z direction;

    merging the plurality of survey sample points and the correlated profile sample points; and

    generating the surface topology map of the surface from the merged plurality of survey sample points and the correlated profile sample points.

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