METHOD AND SYSTEM FOR SEMICONDUCTOR PROCESS CONTROL AND MONITORING BY USING A DATA QUALITY METRIC
First Claim
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1. A method of monitoring a production process for processing microstructure devices in at least one process tool, the method comprising:
- performing a data communication process so as to communicate a plurality of measurement data at least several times from said at least one process tool to a fault detection system during processing of a microstructure device;
determining a data communication quality metric in said fault detection system, said data communication quality metric indicating at least a degree of completeness of said measurement data; and
performing a fault detection process in said fault detection system on the basis of said plurality of measurement data and said data communication quality metric.
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Abstract
During fault detection of a production process, the influence of the data communication process for communicating measurement readings to the fault detection system may be taken into consideration. In one illustrative embodiment, a data rate related parameter may be used as an input variable for a data reduction procedure, thereby enabling an efficient assessment of the quality of the remaining “real” process and tool parameters.
34 Citations
20 Claims
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1. A method of monitoring a production process for processing microstructure devices in at least one process tool, the method comprising:
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performing a data communication process so as to communicate a plurality of measurement data at least several times from said at least one process tool to a fault detection system during processing of a microstructure device; determining a data communication quality metric in said fault detection system, said data communication quality metric indicating at least a degree of completeness of said measurement data; and performing a fault detection process in said fault detection system on the basis of said plurality of measurement data and said data communication quality metric. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of fault detection in a semiconductor manufacturing process, the method comprising:
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communicating measurement data for each of a plurality of process parameters of said manufacturing process to a fault detection system; performing a data reduction process in said fault detection system by using each of said plurality of process parameters as an input variable; determining a data rate metric for a data communication process used for communicating said measurement data; using said data rate metric as a further input variable of said data reduction process; and assessing said semiconductor manufacturing process by using a quality metric obtained by said data reduction process on the basis of said input variables and by using a data rate contribution value indicating a contribution of said data rate metric to said quality metric. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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19. A fault detection system, comprising:
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an interface configured to receive measurement data from at least one process tool used for processing a substrate, said measurement data being indicative of a plurality of process parameters of said at least one process tool; and a fault detection module connected to said interface and configured to determine a data communication quality metric indicating at least a data rate of a data communication of said interface when receiving said measurement data, said fault detection module further being configured to determine a fault condition of said at least one process tool on the basis of said data communication quality metric and said measurement data. - View Dependent Claims (20)
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Specification