MICROMECHANICAL DEVICE HAVING A DRIVE FRAME
1 Assignment
0 Petitions
Accused Products
Abstract
A micromechanical device includes at least one drive frame and at least one vibrator, the vibrator being situated in a region surrounded by the drive frame; the vibrator being mechanically coupled to the drive frame. The drive frame is able to be excited to generate a flexural vibration.
11 Citations
22 Claims
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1-11. -11. (canceled)
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12. A micromechanical device comprising:
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at least one drive frame adapted to be excited to a flexural vibration; and at least one vibrator, the vibrator being situated in a region surrounded by the drive frame, the vibrator being mechanically coupled to the drive frame. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification