MICROMECHANICAL RATE-OF-ROTATION SENSOR
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Abstract
A micromechanical rate-of-rotation sensor for detecting a rate of rotation about a sense axis includes a substrate, a detection unit, means for generating a rotational oscillation of the detection unit about a drive axis which is orthogonal to the sense axis, and a central suspension means rotatably coupling the detection unit to the substrate in a fulcrum of the detection unit. The central suspension means is configured to permit the detection unit to perform a detection movement about a detection axis orthogonal to the sense axis in the form of a rotational oscillation about the central suspension means. The sensor also includes at least two second suspension means coupling the detection unit and the substrate for providing a response behavior specific to rotation about at least one of the drive axis and the detection axis.
51 Citations
39 Claims
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1-20. -20. (canceled)
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21. A micromechanical rate-of-rotation sensor for detecting a rate of rotation about a sense axis, the sensor comprising:
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a substrate; a detection unit; means for generating a rotational oscillation of the detection unit about a drive axis which is orthogonal to the sense axis; a central suspension means rotatably coupling the detection unit to the substrate in a fulcrum of the detection unit, the central suspension means configured to permit the detection unit to perform a detection movement about a detection axis orthogonal to the sense axis in the form of a rotational oscillation about the central suspension means; and at least two second suspension means coupling the detection unit and the substrate for providing a response behavior specific to rotation about at least one of the drive axis and the detection axis. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 34, 35, 36, 37, 38, 39)
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33. The micromechanical rate-of-rotation sensor of claim 33, wherein at least one of the first and second ends of the spring element is one of rounded and elliptically rounded.
Specification