OPTICAL APPARATUS FOR PLASMA
First Claim
Patent Images
1. An optical apparatus for plasma, comprising:
- a light collection lens provided to receive optical emission spectrum from plasma;
a first aperture stop disposed between the light collection lens and the plasma to block out-focused light;
a second aperture stop disposed between the light collection lens and an imaging area of the light collection lens to block in-focused light; and
a pinhole disposed at the imaging area of the light collection lens to limit depth of focus.
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Accused Products
Abstract
An optical apparatus for plasma includes a light collection lens provided to receive optical emission spectrum from plasma, a first aperture stop disposed between the light collection lens and the plasma to block out-focused light, a second aperture stop disposed between the light collection lens and an imaging area of the light collection lens to block in-focused light, and a pinhole disposed at the imaging area of the light collection lens to limit depth of focus.
6 Citations
20 Claims
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1. An optical apparatus for plasma, comprising:
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a light collection lens provided to receive optical emission spectrum from plasma; a first aperture stop disposed between the light collection lens and the plasma to block out-focused light; a second aperture stop disposed between the light collection lens and an imaging area of the light collection lens to block in-focused light; and a pinhole disposed at the imaging area of the light collection lens to limit depth of focus. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An optical apparatus comprising:
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a light collecting lens; a plasma generator comprising a chamber, an energy applying means and a window, wherein the light collecting lens is configured to receive an optical emission spectrum emitted from an object area through the window of the plasma generator; a first aperture stop disposed between the light collection lens and the window to block out-focused light; a second aperture stop disposed between the light collection lens and an imaging area of the light collection lens to block in-focused light; a pinhole disposed at an imaging area of the light collecting lens to limit depth of focus (DOF) of the object area; an accumulated light source removing unit disposed at a back-end of the pinhole; a light transmitting unit disposed at a back-end of the accumulated light source removing unit, wherein the accumulated light source removing unit concentrates and transmits the light passing the pinhole to the light transmitting unit; a spectrum unit configured to measure an intensity of output light received from the light transmitting unit according to wavelength; a control unit configured to receive an output signal of the spectrum unit to process the received signal; an align unit disposed between the second aperture stop and the pinhole to change a path of light passing the light collection lens; a frame including movable means, wherein the light collection lens, the first aperture stop, the second aperture stop and the pin hole are mounted on the frame; and a lens transporting unit mounted on the frame. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification