LIGHT-EMITTING DEVICE AND MANUFACTURING METHOD THEREOF
First Claim
1. A method of fabricating a light emitting device comprising:
- providing a substrate, wherein the substrate comprises a first major surface and a second major surface;
forming a plurality of light emitting stack layers on the first major surface;
forming an etching protection layer on the plurality of light emitting stack layers;
forming a plurality of discontinuous holes on the substrate by a discontinuous laser beam;
etching the plurality of discontinuous holes; and
cleaving the substrate through the plurality of discontinuous holes.
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Accused Products
Abstract
A light emitting device and a method of fabricating thereof are provided. The method of fabricating the light emitting device comprises: providing a substrate having a first major surface and a second major surface; forming a plurality of light-emitting stacks on the first major surface; forming an etching protection layer on each of the light emitting stacks; forming a plurality of holes by a discontinuous laser beam on the substrate; etching the plurality of holes; and slicing off the substrate along the plurality of holes to form a light emitting device. The light emitting device has a substrate wherein the sidewall of the substrate comprising a first area with a substantially flat surface and a second area with substantially textured surface.
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Citations
17 Claims
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1. A method of fabricating a light emitting device comprising:
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providing a substrate, wherein the substrate comprises a first major surface and a second major surface; forming a plurality of light emitting stack layers on the first major surface; forming an etching protection layer on the plurality of light emitting stack layers; forming a plurality of discontinuous holes on the substrate by a discontinuous laser beam; etching the plurality of discontinuous holes; and cleaving the substrate through the plurality of discontinuous holes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A light emitting device comprising:
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a substrate, wherein the substrate comprising a first major surface, a second major surface, and a sidewall; a light emitting stack layer on the substrate, wherein the sidewall of the substrate comprising a first area and a second area;
wherein the morphology of the first area is substantially flat and the morphology of the second area is substantially textured. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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Specification