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Ultrasound Transducer Manufactured by Using Micromachining Process, its Device, Endoscopic Ultrasound Diagnosis System Thereof, and Method for Controlling the Same

  • US 20100201222A1
  • Filed: 04/20/2010
  • Published: 08/12/2010
  • Est. Priority Date: 03/03/2006
  • Status: Active Grant
First Claim
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1. An ultrasound transducer manufactured by using a micromachining process, comprising:

  • a first electrode into which a control signal for transmitting ultrasound is input;

    a substrate on which the first electrode is formed;

    a second electrode facing the first electrode;

    a membrane on which the second electrode is formed and which vibrates and generates the ultrasound when voltage is applied between the first and second electrodes;

    a supporting member formed by a first piezoelectric film, the supporting member being supporting the membrane; and

    a third electrode jointed to the supporting member.

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