SENSOR

• US 20100201356A1
• Filed: 02/11/2009
• Published: 08/12/2010
• Est. Priority Date: 02/11/2009
• Status: Active Grant

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: Koller, Adolf, Elian, Klaus
• Granted Patent: US 8,289,019 B2
• Time in Patent Office: Days
• US Class Current: 324/252
• CPC Class Codes: B29C 45/0013 using fillers dispersed in the moulding material, e.g. metal particles
• CPC Class Codes: B29C 45/14639 for obtaining an insulating effect, e.g. for electrical components
• CPC Class Codes: B29K 2995/0008 Magnetic or paramagnetic
• CPC Class Codes: B82Y 25/00 Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
• CPC Class Codes: G01D 1/00 Measuring arrangements giving results other than momentary value of variable, of general application G01D3/00 takes precedence; in tariff metering apparatus G01D4/00; transducers not specially adapted for a specific variable G01D5/00
• CPC Class Codes: G01D 15/00 Component parts of recorders for measuring arrangements not specially adapted for a specific variable
• CPC Class Codes: G01D 21/00 Measuring or testing not otherwise provided for
• CPC Class Codes: G01P 3/487 delivered by rotating magnets
• CPC Class Codes: G01P 3/488 delivered by variable reluctance detectors
• CPC Class Codes: G01R 33/093 using multilayer structures, e.g. giant magnetoresistance sensors thin magnetic films H01F10/00
• CPC Class Codes: G01R 33/098 comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
• CPC Class Codes: H01L 2224/48247 connecting the wire to a bond pad of the item
• CPC Class Codes: H01L 2224/8592 Applying permanent coating, e.g. protective coating
• CPC Class Codes: H01L 2924/00012 Relevant to the scope of the group, the symbol of which is combined with the symbol of this group
• CPC Class Codes: H01L 2924/181 Encapsulation

Abstract

A sensor including a substrate and magnetic material. The substrate has a main major surface and includes at least two spaced apart ferromagnetic layers. The magnetic material encapsulates the substrate such that the magnetic material is adjacent the main major surface.

Claims

1. A sensor comprising:

a substrate having a main major surface and comprising at least two spaced apart ferromagnetic layers; and

magnetic material encapsulating the substrate such that the magnetic material is adjacent the main major surface.

2. The sensor of claim 1, wherein the at least two spaced apart ferromagnetic layers are spaced apart by more than 0.1 nanometers and less than 10 nanometers.

3. The sensor of claim 1, wherein the substrate comprises a non-ferromagnetic layer between the at least two spaced apart ferromagnetic layers.

4. The sensor of claim 1, wherein the substrate comprises an insulating layer between the at least two spaced apart ferromagnetic layers.

5. The sensor of claim 1, wherein the at least two spaced apart ferromagnetic layers form a magneto-resistor.

6. The sensor of claim 1, wherein the at least two spaced apart ferromagnetic layers are part of a giant magneto-resistance sensing element.

7. The sensor of claim 1, comprising at least two contact elements electrically coupled to the substrate.

8. The sensor of claim 1, wherein the substrate is a semiconductor die.

9. The sensor of claim 8, wherein the semiconductor die comprises an integrated circuit coupled to the at least two spaced apart ferromagnetic layers.

10. The sensor of claim 8, wherein the semiconductor die comprises peripheral circuitry for evaluating the resistance of the at least two spaced apart ferromagnetic layers.

11. The sensor of claim 1, wherein the sensor is configured to be used in an automobile application and to sense movement of one of a wheel, a cam shaft, a crank shaft, and a transmission part.

12. The sensor of claim 1, wherein at least part of the substrate is insulated from the magnetic material.

13. A sensor comprising:

a substrate having opposing major surfaces and comprising a giant magneto-resistance sensing element; and

magnetic material encapsulating the substrate, wherein the magnetic material is substantially parallel to the opposing major surfaces at the interface between the magnetic material and the substrate.

14. The sensor of claim 13, wherein at least part of the substrate is insulated from the magnetic material.

15. The sensor of claim 13, wherein the magnetic material includes magnetic particles and a polymer.

16. The sensor of claim 13, wherein the magnetic material is applied via one of injection molding and compression molding and transfer molding.

17. A method of manufacturing a sensor, comprising:

providing a substrate having a main major surface and comprising at least two spaced apart ferromagnetic layers; and

encapsulating the substrate with magnetic material such that the magnetic material is adjacent the main major surface.

18. The method of claim 17, comprising:

applying the substrate to a carrier structure; and

electrically coupling the substrate to the carrier structure via contact elements.

19. The method of claim 18, wherein encapsulating the substrate comprises:

encapsulating the contact elements.

20. The method of claim 17, comprising:

magnetizing the magnetic material in one direction.

21. The method of claim 17, wherein providing a substrate comprises:

providing a non-ferromagnetic layer between the at least two spaced apart ferromagnetic layers.

22. The method of claim 17, wherein providing a substrate comprises:

providing an insulating layer between the at least two spaced apart ferromagnetic layers.

23. A method of manufacturing a sensor, comprising:

providing a substrate having opposing major surfaces and comprising a giant magneto-resistance sensing element; and

encapsulating the substrate with magnetic material such that the magnetic material is substantially parallel to the opposing major surfaces at the interface between the magnetic material and the substrate.

24. The method of claim 23, wherein encapsulating the substrate comprises:

molding via one of injection molding and compression molding and transfer molding.

25. The method of claim 23, wherein the magnetic material includes magnetic particles and a polymer.