Plasma system and method of producing a functional coating
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Abstract
A plasma system has at least one inductively coupled high-frequency plasma jet source having a burner body delimiting a plasma generating space, having an outlet orifice for the plasma jet, and a chamber communicating with the plasma jet source through the outlet orifice, having a substrate situated in the chamber, where it is exposed to the plasma jet. The substrate is situated on a substrate electrode to which an electric voltage may be applied. In addition, a method of producing a functional coating on the substrate using such a plasma system is also described. In a preferred embodiment, during operation of the plasma system, both the plasma jet and the electric voltage on the substrate electrode are pulsed and/or a pressure gradient is maintained between the interior of the plasma jet source and the interior of the chamber.
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Citations
46 Claims
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1-18. -18. (canceled)
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19. A plasma system, comprising:
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at least one inductively coupled high-frequency plasma jet source including a burner body delimiting a plasma generating space; a chamber including an outlet orifice for a plasma jet, the chamber communicating with the at least one inductively coupled plasma jet source through the outlet orifice; a substrate electrode capable of receiving an electric voltage; and a substrate situated in the chamber and on the substrate electrode, the substrate being exposed to the plasma jet in the chamber. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27)
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28. A method of producing a functional coating on a substrate, comprising:
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placing the substrate in a chamber; generating a plasma having reactive particles by a high-frequency, inductively coupled plasma jet source, the plasma emerging in the form of a plasma jet from the plasma jet source and entering the chamber connected thereto, where the plasma acts on the substrate so that the functional coating is one of produced and deposited on the substrate; and situating the substrate on a substrate electrode in order to expose the substrate to an electric voltage at least intermittently. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46)
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Specification