COMPOSITE SENSOR AND ELECTRONIC DEVICE
First Claim
Patent Images
1. A composite sensor, comprising:
- a package including a first space having a first pressure and a second space having a second pressure lower than the first pressure;
an acceleration sensor element disposed in the first space; and
a vibration type angular velocity sensor element disposed in the second space, wherein the first space has a volume smaller than a volume of the second space.
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Abstract
A composite sensor includes: a package including a container and a lid; a plurality of spaces that is partitioned by at least the container and the lid, and has different pressures, the plurality of the spaces including a first space sealed at around an atmospheric pressure and a second space sealed at a depressurized state; an acceleration sensor element disposed in the first space; and a vibration type angular velocity sensor element disposed in the second space. In the sensor, the first space has a volume smaller than a volume of the second space.
16 Citations
10 Claims
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1. A composite sensor, comprising:
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a package including a first space having a first pressure and a second space having a second pressure lower than the first pressure; an acceleration sensor element disposed in the first space; and a vibration type angular velocity sensor element disposed in the second space, wherein the first space has a volume smaller than a volume of the second space. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification