SENSOR ELEMENT
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Abstract
A sensor element is provided for sensing accelerations in three spatial directions, which furnishes reliable measurement results and moreover can be implemented economically and with a small configuration. The sensor element encompasses at least one seismic mass deflectable in three spatial directions, a diaphragm structure that functions as a suspension mount for the seismic mass, and at least one stationary counterelectrode for capacitive sensing of the deflections of the diaphragm structure. According to the exemplary embodiments and/or exemplary methods of the present invention, the diaphragm structure encompasses at least four electrode regions, electrically separated from one another, that are mechanically coupled via the seismic mass.
15 Citations
14 Claims
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1-7. -7. (canceled)
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8. A sensor element for sensing accelerations in three spatial directions, comprising:
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at least one seismic mass deflectable in three spatial directions; a diaphragm structure that functions as a suspension mount for the seismic mass and encompasses at least one electrode; and at least one stationary counterelectrode for capacitive sensing of the deflections of the diaphragm structure; wherein the diaphragm structure encompasses at least four electrode regions, electrically separated from one another, that are mechanically coupled via the seismic mass. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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Specification