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SEMICONDUCTOR WAFER METROLOGY APPARATUS AND METHOD

  • US 20100206098A1
  • Filed: 09/30/2008
  • Published: 08/19/2010
  • Est. Priority Date: 10/04/2007
  • Status: Active Grant
First Claim
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1. A method of measuring the mass of a semiconductor wafer, the method including:

  • placing the wafer on a sensing element of a first weighing instrument, the sensing element of the first weighing instrument being inside a grounded faraday cage which is on a sensing element of a second weighing instrument whereby the weight of the faraday cage is measurable independently of the weight of the wafer;

    determining a change in a measured weight of the faraday cage indicated by the second weighing instrument when the wafer is placed inside the faraday cage; and

    correcting a measured weight of the wafer indicated by the first weighing instrument using the determined change in measured weight.

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