TRANSISTOR, SEMICONDUCTOR DEVICE INCLUDING THE TRANSISTOR, AND MANUFACTURING METHOD OF THE TRANSISTOR AND THE SEMICONDUCTOR DEVICE
First Claim
Patent Images
1. A transistor comprising:
- a gate electrode;
a gate insulating layer provided over the gate electrode;
an oxide semiconductor layer provided over the gate insulating layer and overlapping with the gate electrode;
a silicon layer provided over and in contact with a surface of the oxide semiconductor layer; and
a source electrode layer and a drain electrode layer electrically connected to the oxide semiconductor layer.
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Accused Products
Abstract
To suppress deterioration in electrical characteristics in a transistor including an oxide semiconductor layer or a semiconductor device including the transistor. In a transistor in which a channel layer is formed using an oxide semiconductor, a silicon layer is provided in contact with a surface of the oxide semiconductor layer. Further, the silicon layer is provided in contact with at least a region of the oxide semiconductor layer, in which a channel is formed, and a source electrode layer and a drain electrode layer are provided in contact with regions of the oxide semiconductor layer, over which the silicon layer is not provided.
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Citations
17 Claims
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1. A transistor comprising:
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a gate electrode; a gate insulating layer provided over the gate electrode; an oxide semiconductor layer provided over the gate insulating layer and overlapping with the gate electrode; a silicon layer provided over and in contact with a surface of the oxide semiconductor layer; and a source electrode layer and a drain electrode layer electrically connected to the oxide semiconductor layer. - View Dependent Claims (2, 3, 4, 5)
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6. A transistor comprising:
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a gate electrode; a gate insulating layer provided over the gate electrode; an oxide semiconductor layer provided over the gate insulating layer and overlapping with the gate electrode; a silicon layer provided over and in contact with a part of a surface of the oxide semiconductor layer; a first metal oxide layer and a second metal oxide layer provided over and in contact with at least a part of the surface of the oxide semiconductor layer, over which the silicon layer is not provided; a source electrode layer electrically connected to the first metal oxide layer; and a drain electrode layer electrically connected to the second metal oxide layer. - View Dependent Claims (7, 8)
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9. A transistor comprising:
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a gate electrode; a gate insulating layer provided over the gate electrode; a source electrode layer and a drain electrode layer provided over the gate insulating layer; an oxide semiconductor layer provided over the source electrode layer and the drain electrode layer and provided over the gate electrode with the gate insulating layer interposed therebetween; and a silicon layer provided over and in contact with a surface of the oxide semiconductor layer. - View Dependent Claims (10, 11)
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12. A manufacturing method of a transistor, comprising the steps of:
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forming a gate electrode over a substrate; forming a gate insulating layer over the gate electrode; forming an oxide semiconductor layer over the gate insulating layer so as to overlap with the gate electrode; forming a silicon layer so as to cover the oxide semiconductor layer; etching the silicon layer to expose a part of the oxide semiconductor layer; forming a conductive film over the silicon layer and the oxide semiconductor layer; and etching the conductive film to form a source electrode layer and a drain electrode layer. - View Dependent Claims (13, 14)
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15. A manufacturing method of a transistor, comprising the steps of:
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forming a gate electrode over a substrate; forming a gate insulating layer over the gate electrode; forming an oxide semiconductor layer over the gate insulating layer so as to overlap with the gate electrode; forming a silicon layer so as to cover the oxide semiconductor layer; etching the silicon layer to expose a part of the oxide semiconductor layer; performing plasma treatment on the exposed oxide semiconductor layer to form a low-resistance region; forming a conductive film over the silicon layer and the oxide semiconductor layer; and etching the conductive film to form a source electrode layer and a drain electrode layer. - View Dependent Claims (16, 17)
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Specification