MEMS Interconnection Pins Fabrication on a Reusable Substrate for Probe Card Application
First Claim
1. A method for forming a Micro-Electro-Mechanical Systems (MEMS) interconnection pin, the method comprising:
- forming a conductive layer on a substrate;
forming a sacrificial layer on the conductive layer;
forming the MEMS interconnection pin on the sacrificial layer, the MEMS interconnection pin has a pin base attached to a frame that has direct contact to the conductive layer; and
removing at least partially, the sacrificial layer to detach the MEMS interconnection pin from the substrate.
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Accused Products
Abstract
A Micro-Electro-Mechanical-Systems (MEMS) interconnection pin is fabricated on a sacrificial layer, which is formed on a conductive layer and a substrate. The MEMS interconnection pin has a pin base attached to a frame that has direct contact to the conductive layer. The sacrificial layer is then removed, at least partially, to detach the MEMS interconnection pin from the substrate. In one embodiment, the MEMS interconnection pin has a pin base, two springs extending out from two different surfaces of the pin base, and a tip portion attached to each spring. The tip portions include one or more contact tips to make contact to conductive subjects.
37 Citations
20 Claims
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1. A method for forming a Micro-Electro-Mechanical Systems (MEMS) interconnection pin, the method comprising:
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forming a conductive layer on a substrate; forming a sacrificial layer on the conductive layer; forming the MEMS interconnection pin on the sacrificial layer, the MEMS interconnection pin has a pin base attached to a frame that has direct contact to the conductive layer; and removing at least partially, the sacrificial layer to detach the MEMS interconnection pin from the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A Micro-Electro-Mechanical Systems (MEMS) interconnection pin for making electrical contacts between two conductive subjects, the MEMS interconnection pin comprising:
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a pin base; two springs extending out from two different surfaces of the pin base; and two tip portions, each tip portions attached to an end of one of the springs, each tip portion including one or more contact tips to make contact to one of the conductive subjects, wherein one end of the pin base has a broken surface that is formed by detaching the MEMS interconnection pin with force from a substrate on which the MEMS interconnection pin was fabricated. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A Micro-Electro-Mechanical Systems (MEMS) interconnection pin for making electrical contacts between two conductive subjects, the MEMS interconnection pin comprising:
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a pin base; a spring extending out from a surface of the pin base; and a tip portion attached to an end of the spring, the tip portion including one or more contact tips to make contact to one of the conductive subjects, wherein one end of the pin base has a broken surface that is formed by detaching the MEMS interconnection pin with force from a substrate on which the MEMS interconnection pin was fabricated. - View Dependent Claims (19, 20)
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Specification