User Interface for Wafer Data Analysis and Visualization

• US 20100211903A1
• Filed: 05/03/2010
• Published: 08/19/2010
• Est. Priority Date: 12/24/2002
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Luque, Jorge
• Granted Patent: US 7,945,085 B2
• Time in Patent Office: Days
• US Class Current: 715/771
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

Abstract

A wafer viewer system is provided for graphical presentation and analysis of a wafer and a wafer series. More specifically, the wafer viewer system includes a graphical user interface for displaying a wafer, graphically selecting regions of the wafer for analysis, performing analysis on the selected regions of the wafer, and displaying results of the analysis.

Claims

1. A graphical user interface for performing a profile analysis, comprising:

displaying an electronic microscope image;

providing controls for adjusting the electronic microscope image; and

providing a graphical measurement control.

2. A graphical user interface for performing a profile analysis as recited in claim 1, further comprising:

providing controls for calibrating the graphical measurement control.

3. A graphical user interface for performing a profile analysis as recited in claim 2, wherein the controls for calibrating the graphical measurement control includes a first calibration slider and a second calibration slider, and a calibration distribution select field to enable assignment of a distance value to a displayed distance between the first and second calibration sliders.

4. A graphical user interface for performing a profile analysis as recited in claim 3, further comprising:

a graphical pointer to obtain cartesian coordinates relative to main axes based on the distance value assigned to the displayed distance between the first and second calibration sliders.

5. A graphical user interface for performing a profile analysis as recited in claim 1, further comprising:

displaying a profile over the electronic microscope image.

6. A graphical user interface for performing a profile analysis as recited in claim 1, wherein the controls for adjusting the electronic microscope image includes an image zoom control and an image position control.

7. A graphical user interface for performing a profile analysis as recited in claim 1, wherein the controls for adjusting the electronic microscope image includes a rotation select field to enable rotation of the electronic microscope image.

8. A graphical user interface for performing a profile analysis as recited in claim 1, wherein the controls for adjusting the electronic microscope image includes a drift select field to enable correction of distortions in the electronic microscope image.

9. A computer readable medium containing program instructions for providing a graphical user interface for performing a profile analysis, comprising:

program instructions for displaying an electronic microscope image;

program instructions for providing controls for adjusting the electronic microscope image; and

program instructions for providing a graphical measurement control.

10. A computer readable medium containing program instructions for providing a graphical user interface for performing a profile analysis as recited in claim 9, further comprising:

program instructions for providing controls for calibrating the graphical measurement control.

11. A computer readable medium containing program instructions for providing a graphical user interface for performing a profile analysis as recited in claim 10, wherein the controls for calibrating the graphical measurement control includes a first calibration slider and a second calibration slider, and a calibration distribution select field to enable assignment of a distance value to a displayed distance between the first and second calibration sliders.

12. A computer readable medium containing program instructions for providing a graphical user interface for performing a profile analysis as recited in claim 11, further comprising:

program instructions for providing a graphical pointer to obtain cartesian coordinates relative to main axes based on the distance value assigned to the displayed distance between the first and second calibration sliders.

13. A computer readable medium containing program instructions for providing a graphical user interface for performing a profile analysis as recited in claim 9, further comprising:

program instructions for displaying a profile over the electronic microscope image.

14. A computer readable medium containing program instructions for providing a graphical user interface for performing a profile analysis as recited in claim 9, wherein the controls for adjusting the electronic microscope image includes an image zoom control and an image position control.

15. A computer readable medium containing program instructions for providing a graphical user interface for performing a profile analysis as recited in claim 9, wherein the controls for adjusting the electronic microscope image includes a rotation select field to enable rotation of the electronic microscope image.

16. A computer readable medium containing program instructions for providing a graphical user interface for performing a profile analysis as recited in claim 9, wherein the controls for adjusting the electronic microscope image includes a drift select field to enable correction of distortions in the electronic microscope image.