User Interface for Wafer Data Analysis and Visualization
First Claim
Patent Images
1. A graphical user interface for performing a profile analysis, comprising:
- displaying an electronic microscope image;
providing controls for adjusting the electronic microscope image; and
providing a graphical measurement control.
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Abstract
A wafer viewer system is provided for graphical presentation and analysis of a wafer and a wafer series. More specifically, the wafer viewer system includes a graphical user interface for displaying a wafer, graphically selecting regions of the wafer for analysis, performing analysis on the selected regions of the wafer, and displaying results of the analysis.
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Citations
16 Claims
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1. A graphical user interface for performing a profile analysis, comprising:
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displaying an electronic microscope image; providing controls for adjusting the electronic microscope image; and providing a graphical measurement control. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A computer readable medium containing program instructions for providing a graphical user interface for performing a profile analysis, comprising:
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program instructions for displaying an electronic microscope image; program instructions for providing controls for adjusting the electronic microscope image; and program instructions for providing a graphical measurement control. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification