ACCELERATION SENSOR
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Accused Products
Abstract
An acceleration sensor having a substrate, at least one web, and a seismic mass, the web and the seismic mass being situated over a plane of the substrate. The seismic mass is situated on at least two sides of the web and elastically suspended on the web. The web is anchored on the substrate with the aid of at least one anchor. At least one anchor is situated outside the center of gravity of the seismic mass.
29 Citations
23 Claims
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1-10. -10. (canceled)
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11. A micromechanical component, comprising:
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a carrier substrate; an outer suspension element; an inner suspension element; a frame which is connected to the carrier substrate by the outer suspension element, the frame being tiltable about a first axis in a main plane of extension of the carrier substrate, and being oscillatory in a main plane of extension about a second axis that is perpendicular to the first axis; and an oscillation element that is connected to the frame by the inner suspension element and is tiltable about the second axis; wherein the outer suspension element is dimensioned in so that a resonant frequency of a first oscillation of the frame about the second axis lies within a half width of a resonance curve of a second oscillation of the oscillation element about the second axis. - View Dependent Claims (12, 13, 14, 15, 17, 18, 19, 20, 21, 22, 23)
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16. A method for providing an oscillation excitation of an oscillation element of a micromechanical component, the method comprising:
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exciting, using one excitation frequency, the oscillation element to provide a first oscillation using one excitation frequency; and exciting, using the one excitation frequency, the oscillation element to provide a second oscillation; wherein the micromechanical component, having the oscillation element, includes; a carrier substrate; an outer suspension element; an inner suspension element; and a frame which is connected to the carrier substrate by the outer suspension element, the frame being tiltable about a first axis in a main plane of extension of the carrier substrate, and being oscillatory in a main plane of extension about a second axis that is perpendicular to the first axis, wherein the oscillation element is connected to the frame by the inner suspension element and is tiltable about the second axis, and wherein the outer suspension element is dimensioned in so that a resonant frequency of a first oscillation of the frame about the second axis lies within a half width of a resonance curve of a second oscillation of the oscillation element about the second axis.
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Specification