ACCELERATION SENSOR AND ELECTRONIC DEVICE

• US 20100212426A1
• Filed: 02/23/2010
• Published: 08/26/2010
• Est. Priority Date: 02/24/2009
• Status: Active Grant

• Current Assignee: 138 East LCD Advancements Limited (Vector Capital Corporation)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: OSHIO, Masahiro
• Granted Patent: US 8,573,058 B2
• Time in Patent Office: Days
• US Class Current: 73/514.320
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: G01P 1/023 for acceleration measuring devices
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type

Abstract

An acceleration sensor includes: a support member; a fixed electrode provided on the support member; a movable unit; a movable electrode provided on the movable unit and disposed opposed to the fixed electrode to generate capacity; and a projection extending from the opposed surface of at least either the fixed electrode or the movable electrode in one direction within the surface.

Claims

1. An acceleration sensor comprising:

a support member;

a fixed electrode extending from the support member, in the form of an arm;

a movable unit;

a movable electrode extending from the movable unit and disposed opposed to the fixed electrode through a gap, in the form of an arm;

a connection member connecting the support member and the movable unit, is possible an elastic deformation; and

one of the fixed electrode and the movable electrode have an opposite surface opposed other,

a projection is formed the opposite surface of at least either the fixed electrode or the movable electrode.

2. The acceleration sensor according to claim 1, wherein the projection is formed from a tip member to a connection member of the support member at least either the fixed electrode or the movable electrode.

3. The acceleration sensor according to claim 1, wherein the opposite surface has a one end in a direction perpendicular to the direction of extending in the opposite surface and the other end opposite side of the one end, the projection is formed at least either the one end or the other end.

4. The acceleration sensor according to claim 1, wherein the projection is formed the opposite surface of the fixed electrode and the movable electrode.

5. The acceleration sensor according to claim 1, wherein each of the fixed electrode, the movable electrode, the support member, and the movable unit has a laminated layer structure alternately piled up a conductive layer and an insulated layer.

6. The acceleration sensor according to claim 5, wherein the projection is formed by the use of the conductive layer or the insulated layer.

7. The acceleration sensor according to claim 1, wherein each of the fixed electrode, the movable electrode, the support member, and the movable unit is formed by the use of monocrystal silicon.

8. An electronic device comprising the acceleration sensor according to claim 1.

9. An electronic device comprising the acceleration sensor according to claim 2.

10. An electronic device comprising the acceleration sensor according to claim 3.

11. An electronic device comprising the acceleration sensor according to claim 4.

12. An electronic device comprising the acceleration sensor according to claim 5.

13. An electronic device comprising the acceleration sensor according to claim 6.

14. An electronic device comprising the acceleration sensor according to claim 7.