FLOW SENSOR APPARATUS AND METHOD WITH MEDIA ISOLATED ELECTRICAL CONNECTIONS
First Claim
1. A sensor assembly for measuring a property of fluid flowing from an opening to an exit, the sensor assembly comprising:
- a sensor for measuring the property of a fluid;
one or more wire bond pads situated adjacent to a top side of the sensor for communicating signals relative to the sensor; and
a top cap situated adjacent to the top side of the sensor and secured relative to the sensor, the top cap defining at least part of the opening and/or the exit of the sensor assembly, the top cap also at least partially defining a flow channel that extends from the opening, past the sensor, and out the exit of the sensor assembly, the top cap being structured and attached relative to the sensor such that the one or more wire bond pads are not exposed to the flow channel but are accessible for electrical connection to an external device.
0 Assignments
0 Petitions
Accused Products
Abstract
A flow sensor apparatus that utilizes a pressure sensor with media isolated electrical connections. A cap can be attached to topside of the pressure sensor over a diaphragm to protect bond pads and wire bonds from a fluid media. A flow channel can be etched on the cap with an opening and exit on the sides of the cap so that liquid can flow through the flow channel. An inlet port and an outlet port can be attached to the channel'"'"'s opening and exit to allow for fluid flow over the diaphragm. The flow channel creates a larger pressure over portions of the diaphragm that increases the deflection of the diaphragm, which increases an output signal of the pressure sensor. V-grooves can be created on two sides of the pressure sensor and in the cap to create the channel for the fluid in and out of the cap'"'"'s cavity.
36 Citations
20 Claims
-
1. A sensor assembly for measuring a property of fluid flowing from an opening to an exit, the sensor assembly comprising:
-
a sensor for measuring the property of a fluid; one or more wire bond pads situated adjacent to a top side of the sensor for communicating signals relative to the sensor; and a top cap situated adjacent to the top side of the sensor and secured relative to the sensor, the top cap defining at least part of the opening and/or the exit of the sensor assembly, the top cap also at least partially defining a flow channel that extends from the opening, past the sensor, and out the exit of the sensor assembly, the top cap being structured and attached relative to the sensor such that the one or more wire bond pads are not exposed to the flow channel but are accessible for electrical connection to an external device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. A flow sensor assembly for detecting a measure of fluid flow through a flow channel extending between a flow channel opening and a flow channel exit, the flow sensor assembly comprising:
-
a sensor substrate having a sensing component for sensing a measure related to fluid flow through the flow channel, the sensor substrate having a first side that faces the flow channel with the sensing component in communication with the flow channel; one or more electrical components situated on the first side of the sensor substrate; and a top cap secured to the first side of the sensor substrate, the top cap defining at least part of the opening and/or the exit of the flow sensor assembly, the top cap further defining at least in part the flow channel that extends from the opening, past the sensor component, and to the exit of the flow sensor assembly, the top cap configured to fluidly isolate the one or more electrical components from the flow channel. - View Dependent Claims (12, 13, 14, 15, 16)
-
-
17. A method of forming a flow sensor apparatus, comprising:
-
providing a sensor having a sensing component; the sensor further having a plurality of electrical components on a top side of the sensor; providing a top cap having at least part of a flow channel formed in the top cap, with at least one of an opening and an exit in fluid communication with the flow channel; and attaching the top cap to the top side of the sensor such that sensing component can sense the fluid flow in the fluid channel and such that the top cap fluidly isolates the plurality of electrical components from the flow channel. - View Dependent Claims (18, 19, 20)
-
Specification