HIGH DIELECTRIC CONSTANT TRANSITION METAL OXIDE MATERIALS
First Claim
1. A dielectric material for an integrated circuit comprising a transition metal oxide layer comprising hafnium or zirconium with a non-metal dopant in a tetragonal crystal structure, wherein the dielectric material has a dielectric constant at least 30% higher than the transition metal oxide without the dopant.
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Accused Products
Abstract
A transition metal oxide dielectric material is doped with a non-metal in order to enhance the electrical properties of the metal oxide. In a preferred embodiment, a transition metal oxide is deposited over a bottom electrode and implanted with a dopant. In a preferred embodiment, the metal oxide is hafnium oxide or zirconium oxide and the dopant is nitrogen. The dopant can convert the crystal structure of the hafnium oxide or zirconium oxide to a tetragonal structure and increase the dielectric constant of the metal oxide.
51 Citations
16 Claims
- 1. A dielectric material for an integrated circuit comprising a transition metal oxide layer comprising hafnium or zirconium with a non-metal dopant in a tetragonal crystal structure, wherein the dielectric material has a dielectric constant at least 30% higher than the transition metal oxide without the dopant.
Specification