OSCILLATOR DEVICE
First Claim
1. An oscillator device comprising a movable body oscillatably supported about a rotation axis, wherein the movable body is separated into plural electrically separated conductive regions in the thickness direction, and wherein at least one of the plural electrically separated conductive regions in the thickness direction further has plural electrically separated conductive regions.
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Accused Products
Abstract
An oscillator device that includes a movable body oscillatably supported about a rotation axis, wherein the movable body is separated into plural electrically separated conductive regions in the thickness direction, and at least one of the plural electrically separated conductive regions in the thickness direction further has plural electrically separated conductive regions.
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Citations
8 Claims
- 1. An oscillator device comprising a movable body oscillatably supported about a rotation axis, wherein the movable body is separated into plural electrically separated conductive regions in the thickness direction, and wherein at least one of the plural electrically separated conductive regions in the thickness direction further has plural electrically separated conductive regions.
Specification