Probe Card Test Apparatus And Method
First Claim
Patent Images
1. A system for analyzing properties of a probe card, the system comprising:
- a wafer prober in which the probe card is placed;
switch electronics electrically connected to the probe card;
a measurement unit electrically connected to the switch electronics, wherein the measurement unit through the switch electronics is able to perform measurements of a probe that the switch electronics selects from among a plurality of probes on the probe card; and
a fixture that is held on a wafer stage in the wafer prober and brought into contact with the probe card by the wafer prober.
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Accused Products
Abstract
A probe card analyzer mounts on a probe card in a wafer prober and a use a fixture in the wafer probe and switch electronics in place of an ATE head. Methods of testing can confirm that probe cards are operating within their specifications over large temperature ranges and the mechanical force ranges seen in real manufacturing environments. This reduces the cost and improves the accuracy and speed of analyzing probe cards and improves diagnosing problems with probe cards.
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Citations
101 Claims
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1. A system for analyzing properties of a probe card, the system comprising:
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a wafer prober in which the probe card is placed; switch electronics electrically connected to the probe card; a measurement unit electrically connected to the switch electronics, wherein the measurement unit through the switch electronics is able to perform measurements of a probe that the switch electronics selects from among a plurality of probes on the probe card; and a fixture that is held on a wafer stage in the wafer prober and brought into contact with the probe card by the wafer prober. - View Dependent Claims (2, 3, 5, 6, 16, 17, 19, 20, 21, 23, 26, 36, 37, 42, 45, 46, 47, 48, 49, 53, 68, 101)
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4. (canceled)
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7-15. -15. (canceled)
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27-35. -35. (canceled)
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50-52. -52. (canceled)
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54-67. -67. (canceled)
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69-79. -79. (canceled)
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80. A method for analyzing properties of a probe card, the method comprising:
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mounting the probe card in a wafer prober of a type that uses the probe card for probing of a wafer; mounting a fixture on a wafer stage in the wafer prober; using the wafer prober to bring the fixture into contact with probes on the probe card; electrically connecting switch electronics to the probe card, wherein the switch electronics is able to select a probe from among the probes on the probe card; and measuring electrical resistance on the selected probe through the probe card to the surface of the fixture contacting the probe. - View Dependent Claims (84, 89, 90)
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81-83. -83. (canceled)
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85-88. -88. (canceled)
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93. A system for diagnostic measurement of a probe card, the system comprising:
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a wafer prober in which the probe card is placed; switch electronics electrically connected to the probe card; a measurement unit electrically connected to the switch electronics, wherein the measurement unit through the switch electronics is able to perform measurements of a probe that the switch electronics selects from among a plurality of probes on the probe card; and a diagnostic probe containing one or more probe tips, the diagnostic probe being mounted on a chuck stage of the wafer prober;
wherein the diagnostic probe can be moved laterally and vertically relative to the probe card to bring the diagnostic probe tip into contact with any desired location on the probe card including probe tips on the probe card, terminals of components on the probe card and electrical contacts on the probe card. - View Dependent Claims (94, 100)
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95-99. -99. (canceled)
Specification