METHOD AND DEVICE FOR MODULATING LIGHT WITH OPTICAL COMPENSATION
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Accused Products
Abstract
An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which are deposited separately, each deposition providing a different thickness of spacer. Or a patterned photoresist may be used to allow for an etching process to selectively etch back the thickness of a spacer which was deposited in a single deposition. A full-color static graphical image may be formed of combined patterns of interferometric modulator cavities. Each cavity includes a reflector, and an induced absorber, the induced absorber including a spacer having a thickness that defines a color associated with the cavity.
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Citations
92 Claims
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1-81. -81. (canceled)
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82. A device, comprising:
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a light-absorbing material, said light-absorbing material comprising an absorber and one or more layers; a substrate located above said light-absorbing material; a reflector located below said light-absorbing material; and a cavity, a portion of which is located between said light absorbing material and said reflector, wherein the cavity comprises a dielectric film. - View Dependent Claims (83, 84, 85, 86, 87, 88, 89, 90, 91, 92)
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Specification