SEPARABLE MODULATOR
First Claim
Patent Images
1. An electromechanical device comprising:
- a first optical stack located over a substrate and comprising a first electrode;
a second optical stack located adjacent the first optical stack and comprising a second electrode;
a first movable mirror spaced apart from the first optical stack by a first cavity, said first movable mirror having a reflective surface facing the first cavity;
a second movable mirror spaced apart from the second optical stack by a second cavity, said second movable mirror having a reflective surface facing the second cavity; and
a flexible layer located over the first and second movable mirrors and supporting the first and second movable mirrors, wherein the first and second movable mirrors are in electrical communication with one another, and wherein at least a portion of the first and second mirrors are physically separated from one another.
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Abstract
A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.
99 Citations
14 Claims
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1. An electromechanical device comprising:
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a first optical stack located over a substrate and comprising a first electrode; a second optical stack located adjacent the first optical stack and comprising a second electrode; a first movable mirror spaced apart from the first optical stack by a first cavity, said first movable mirror having a reflective surface facing the first cavity; a second movable mirror spaced apart from the second optical stack by a second cavity, said second movable mirror having a reflective surface facing the second cavity; and a flexible layer located over the first and second movable mirrors and supporting the first and second movable mirrors, wherein the first and second movable mirrors are in electrical communication with one another, and wherein at least a portion of the first and second mirrors are physically separated from one another. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of manufacturing an electromechanical device, comprising:
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forming first and second optical stacks over a substrate, wherein said first optical stack comprises a first electrode, and wherein said second optical stack comprises a second electrode; depositing a first sacrificial layer over the first and second optical stacks; forming a first mirror over the first optical stack and a second mirror over the second optical stack, wherein at least a portion of the first and second mirrors are physically separated from one another; forming a flexible layer over the first and second mirrors, wherein the flexible layer is in contact with at least a portion of each of the first and second mirrors; and removing the sacrificial layer. - View Dependent Claims (12, 13, 14)
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Specification