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SEPARABLE MODULATOR

  • US 20100214645A1
  • Filed: 03/01/2010
  • Published: 08/26/2010
  • Est. Priority Date: 12/19/1996
  • Status: Active Grant
First Claim
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1. An electromechanical device comprising:

  • a first optical stack located over a substrate and comprising a first electrode;

    a second optical stack located adjacent the first optical stack and comprising a second electrode;

    a first movable mirror spaced apart from the first optical stack by a first cavity, said first movable mirror having a reflective surface facing the first cavity;

    a second movable mirror spaced apart from the second optical stack by a second cavity, said second movable mirror having a reflective surface facing the second cavity; and

    a flexible layer located over the first and second movable mirrors and supporting the first and second movable mirrors, wherein the first and second movable mirrors are in electrical communication with one another, and wherein at least a portion of the first and second mirrors are physically separated from one another.

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