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WIDE-ANGLE HIGHLY REFLECTIVE MIRRORS AT 193NM

  • US 20100215932A1
  • Filed: 02/26/2009
  • Published: 08/26/2010
  • Est. Priority Date: 02/26/2009
  • Status: Active Grant
First Claim
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1. An optical element comprising a selected substrate and an amorphous coating of formula (HoLo)iHo on said substrate,wherein(HoLo)i is a stack of a plurality i of coating periods consisting of a Ho layer and a Lo layer on said substrate,i is in the range of 14-20,Ho is amorphous MgAl2O4 andLo is amorphous SiO2,to thereby form an amorphous MgAl2O4

  • SiO2 coating on said substrate, the Ho layer of the first period being in contact with the substrate.

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