METHOD FOR ETCHING 3D STRUCTURES IN A SEMICONDUCTOR SUBSTRATE, INCLUDING SURFACE PREPARATION
First Claim
1. A method for producing a three-dimensional via in a semiconductor substrate using deep reactive ion etching, comprising:
- grinding a backside of a substrate, whereby a thinned substrate having extrusions and native oxides on a surface of the backside of the substrate is obtained;
performing a surface treatment on the substrate, wherein the surface treatment is selected from the group consisting of a wet etching step and a dry etching step, whereby the native oxides and extrusions on the surface of the backside of the substrate are removed; and
performing deep reactive ion etching, whereby a three-dimensional via is obtained.
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Abstract
A method is provided for producing 3D structures in a semiconductor substrate using Deep Reactive Ion Etching (DRIE), comprising at least the steps of: providing a substrate, and then grinding the backside of the substrate in order to achieve a thinned substrate, wherein extrusions and native oxides are left after said grinding step, and then performing a surface treatment selected from the group consisting of a wet etching step and a dry etching step in order to remove at least said native oxides and extrusions on the surface of said backside of the substrate which are causes for the grass formation during subsequent etching, and then performing deep reactive ion etching in order to achieve 3D vias.
12 Citations
18 Claims
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1. A method for producing a three-dimensional via in a semiconductor substrate using deep reactive ion etching, comprising:
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grinding a backside of a substrate, whereby a thinned substrate having extrusions and native oxides on a surface of the backside of the substrate is obtained; performing a surface treatment on the substrate, wherein the surface treatment is selected from the group consisting of a wet etching step and a dry etching step, whereby the native oxides and extrusions on the surface of the backside of the substrate are removed; and performing deep reactive ion etching, whereby a three-dimensional via is obtained. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification