RESONATOR SENSOR ASSEMBLY
First Claim
1. A method of packaging a sensor, the method comprising:
- affixing a tuning fork to a platform, the tuning fork having tines comprising one or more surfaces, each tine further comprising an electrode;
affixing an application specific integrated circuit (ASIC) to the platform, andproviding electrical communication between the ASIC and the electrode of each tine for providing stimulus to the tuning fork and for receiving a response signal from the tuning fork.
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Accused Products
Abstract
An improved method and assembly, wherein the method generally includes the steps of providing a coated or uncoated sensor element having an exposed sensing surface; attaching the sensor element to a platform so that the exposed sensing surface is spaced from the platform; and optionally applying a protective layer over the platform while maintaining the sensing surface as exposed. The assembly includes a resonator having a free portion with a sensing surface is incorporated onto a platform, components of the sensor are physically shielded from harsh operating conditions, the requisite space is maintained between the free portion of the resonator and the platform, and the sensing surface of the resonator remains exposed for sensing.
105 Citations
20 Claims
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1. A method of packaging a sensor, the method comprising:
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affixing a tuning fork to a platform, the tuning fork having tines comprising one or more surfaces, each tine further comprising an electrode; affixing an application specific integrated circuit (ASIC) to the platform, and providing electrical communication between the ASIC and the electrode of each tine for providing stimulus to the tuning fork and for receiving a response signal from the tuning fork. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of assembling a fluid sensor, the method comprising:
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disposing a flexure resonator on a base, the flexure resonator comprising at least two prongs each having an electrode; disposing a control circuit on the base, and operatively connecting the control circuit to the electrodes for at least one of transmitting a signal to and receiving a signal from the flexure resonator. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification