VACUUM VALVE
First Claim
1. A vacuum valve comprising:
- a wall (1) with a valve opening (6) and a valve seat that surrounds the valve opening (6) and that has a sealing surface (10) lying in a plane or a sealing ring lying in a plane;
a valve plate (7) that can be adjusted over a closing path from an open position, in which it frees the valve opening (6), into a closed position, in which it closes the valve opening (6), the valve plate has a sealing ring (11) that is pressed in the closed position onto the sealing surface (10) of the valve seat or a sealing surface on which the sealing ring of the valve seat is pressed in the closed position, and during the closing of the vacuum valve, the valve plate (7) is moved from the open position of the valve plate (7) over a main section of the closing path in a main closing direction (14) that is parallel to the valve plate (7) and parallel to the plane of the sealing surface (10) or the sealing ring of the valve seat and is then moved, following the main section of the closing path, over a final section of the closing path running at an angle to the valve plate (7) and at an angle to the plane of the sealing surface (10) or the sealing ring of the valve seat for guiding the valve plate (7) onto the valve seat; and
at least one guide element (15, 16) that guides the valve plate (7) over the final section of the closing path and that is arranged on the wall (1) and that interacts with at least one guide element (17, 18) arranged on the valve plate (7), wherein the valve plate (7) is guided over the final section of the closing path by guide surfaces (19, 20, 21, 22) at an angle to a plane (45) of the sealing surface (10) or the sealing ring of the valve seat, and at least one of the guide surfaces is arranged on the at least one guide element (17, 18) of the valve plate (7) or on the at least one guide element (15, 16) arranged on the wall (1).
5 Assignments
0 Petitions
Accused Products
Abstract
For a vacuum valve including a wall (1) with a valve opening (6) and a valve seat surrounding the valve opening (6) and a valve plate (7), during the closing of the vacuum valve starting from the open position of the valve plate (7), the valve plate (7) is moved over a main section of the closing path in a main closing direction (14) that is parallel to the valve plate (7) and parallel to the plane of the sealing surface (10) or the sealing ring of the valve seat, and is then moved, following the main section of the closing path, over a final section running at an angle to the valve plate (7) and at an angle to the plane of the sealing surface (10) or the sealing ring of the valve seat for guiding the valve plate (7) onto the valve seat. At least one guide element (15, 16) that guides the valve plate (7) over the end section of the closing path and that interacts with a guide element (17, 18) arranged on the valve plate (7) is arranged on the wall (1), and the valve plate (7) is guided over the final section of the closing path by guide surfaces (19, 20, 21, 22) that sit at an angle to the plane (45) of the sealing surface (10) or the sealing ring of the valve seat and of which at least one is arranged on a guide element (17, 18) of the valve plate (7) or on a guide element (15, 16) arranged on the wall (1).
35 Citations
23 Claims
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1. A vacuum valve comprising:
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a wall (1) with a valve opening (6) and a valve seat that surrounds the valve opening (6) and that has a sealing surface (10) lying in a plane or a sealing ring lying in a plane; a valve plate (7) that can be adjusted over a closing path from an open position, in which it frees the valve opening (6), into a closed position, in which it closes the valve opening (6), the valve plate has a sealing ring (11) that is pressed in the closed position onto the sealing surface (10) of the valve seat or a sealing surface on which the sealing ring of the valve seat is pressed in the closed position, and during the closing of the vacuum valve, the valve plate (7) is moved from the open position of the valve plate (7) over a main section of the closing path in a main closing direction (14) that is parallel to the valve plate (7) and parallel to the plane of the sealing surface (10) or the sealing ring of the valve seat and is then moved, following the main section of the closing path, over a final section of the closing path running at an angle to the valve plate (7) and at an angle to the plane of the sealing surface (10) or the sealing ring of the valve seat for guiding the valve plate (7) onto the valve seat; and at least one guide element (15, 16) that guides the valve plate (7) over the final section of the closing path and that is arranged on the wall (1) and that interacts with at least one guide element (17, 18) arranged on the valve plate (7), wherein the valve plate (7) is guided over the final section of the closing path by guide surfaces (19, 20, 21, 22) at an angle to a plane (45) of the sealing surface (10) or the sealing ring of the valve seat, and at least one of the guide surfaces is arranged on the at least one guide element (17, 18) of the valve plate (7) or on the at least one guide element (15, 16) arranged on the wall (1). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification