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Systems and Methods of Laser Texturing and Crystallization of Material Surfaces

  • US 20100219506A1
  • Filed: 12/21/2006
  • Published: 09/02/2010
  • Est. Priority Date: 12/21/2005
  • Status: Active Grant
First Claim
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1. A method for texturing a surface of a semiconductor material, comprising:

  • providing an etching gas in an area around the surface of the material;

    irradiating a portion of the surface with short laser pulses; and

    translating at least one of the surface and a laser beam to allow the short laser pulses to irradiate another portion of the surface;

    wherein the method produces a periodic array of pillars on the surface, resulting in changes in properties of the surface.

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