FRONT SIDE IMPLANTED GUARD RING STRUCTURE FOR BACKSIDE ILLUMINATED IMAGE SENSOR
First Claim
Patent Images
1. A method of forming a backside illuminated image sensor, the method comprising:
- ion-implanting a guard ring structure of a predetermined depth in a front-side surface of a semiconductor substrate; and
forming at least one image sensing element on the front-side surface of the semiconductor substrate, the at least one image sensing element being surrounded by the guard ring structure.
1 Assignment
0 Petitions
Accused Products
Abstract
An image sensor includes a semiconductor substrate, a guard ring structure in the substrate, and at least one pixel surrounded by the guard ring structure. The guard ring structure is implanted in the substrate by high-energy implantation.
-
Citations
20 Claims
-
1. A method of forming a backside illuminated image sensor, the method comprising:
-
ion-implanting a guard ring structure of a predetermined depth in a front-side surface of a semiconductor substrate; and forming at least one image sensing element on the front-side surface of the semiconductor substrate, the at least one image sensing element being surrounded by the guard ring structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. An image sensor, comprising:
-
a semiconductor substrate, the substrate having a front-side surface and a back-side surface opposite the front-side surface; a plurality of image sensing elements formed on the front-side surface of the substrate; and an ion-implanted guard ring structure separating each of the image sensing elements from other image sensing elements, wherein the guard ring structure extends from the front-side surface of the substrate toward the back-side surface of the substrate. - View Dependent Claims (11, 12, 13, 14, 15, 16)
-
-
17. A method of fabricating an image sensor device, comprising:
-
forming a guard ring structure in a semiconductor substrate via ion implantation, said guard ring structure dividing the substrate into a plurality of pixels; forming a plurality of image sensing elements in the substrate, each of the image sensing elements being in one of the pixels and surrounded by the guard ring structure; and annealing the substrate with the guard ring structure and image sensing elements formed therein. - View Dependent Claims (18, 19, 20)
-
Specification