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FRONT SIDE IMPLANTED GUARD RING STRUCTURE FOR BACKSIDE ILLUMINATED IMAGE SENSOR

  • US 20100220226A1
  • Filed: 02/23/2010
  • Published: 09/02/2010
  • Est. Priority Date: 02/24/2009
  • Status: Active Grant
First Claim
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1. A method of forming a backside illuminated image sensor, the method comprising:

  • ion-implanting a guard ring structure of a predetermined depth in a front-side surface of a semiconductor substrate; and

    forming at least one image sensing element on the front-side surface of the semiconductor substrate, the at least one image sensing element being surrounded by the guard ring structure.

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