LOW TEMPERATURE CNT GROWTH USING GAS-PREHEAT METHOD
First Claim
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1. A method for synthesizing carbon nanotubes (CNT) comprising the steps of:
- providing a growth chamber, the growth chamber being heated to a first temperature sufficiently high to facilitate a growth of carbon nanotubes;
passing a substrate through the growth chamber; and
introducing a feed gas into the growth chamber pre-heated to a second temperature sufficient to dissociate at least some of the feed gas into at least free carbon radicals to thereby initiate formation of carbon nanotubes onto the substrate.
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Abstract
A method for synthesizing carbon nanotubes (CNT) comprises the steps of providing a growth chamber, the growth chamber being heated to a first temperature sufficiently high to facilitate a growth of carbon nanotubes; and passing a substrate through the growth chamber; and introducing a feed gas into the growth chamber pre-heated to a second temperature sufficient to dissociate at least some of the feed gas into at least free carbon radicals to thereby initiate formation of carbon nanotubes onto the substrate.
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Citations
28 Claims
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1. A method for synthesizing carbon nanotubes (CNT) comprising the steps of:
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providing a growth chamber, the growth chamber being heated to a first temperature sufficiently high to facilitate a growth of carbon nanotubes; passing a substrate through the growth chamber; and introducing a feed gas into the growth chamber pre-heated to a second temperature sufficient to dissociate at least some of the feed gas into at least free carbon radicals to thereby initiate formation of carbon nanotubes onto the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for synthesizing carbon nanotubes (CNT) comprising the steps of:
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providing a growth chamber, the growth chamber being heated to a first temperature; passing a substrate through the growth chamber; providing a feed gas pre-heated to a second temperature; and introducing into the growth chamber the pre-heated feed gas wherein the second temperature is selected to achieve a desired temperature profile within the growth chamber to allow for the formation of carbon nanotubes on the substrate. - View Dependent Claims (12, 13, 14, 15, 16)
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17. A system for synthesizing carbon nanotubes (CNT) comprising:
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a growth chamber that receives a substrate having a catalyst disposed thereon; a heater for heating the growth chamber to a first temperature, the first temperature sufficiently high to facilitate a growth of carbon nanotubes on the substrate; and a gas pre-heater that heats a feed gas to a second temperature and introduces the feed gas into the growth chamber to synthesize carbon nanotubes on the substrate. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification