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Surface coating method for hydrophobic and superhydrophobic treatment in atmospheric pressure plasma

  • US 20100221452A1
  • Filed: 07/07/2006
  • Published: 09/02/2010
  • Est. Priority Date: 07/09/2005
  • Status: Active Grant
First Claim
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1. A method of coating a surface of a workpiece with fluorocarbon, comprising the steps of:

  • generating first atmospheric pressure glow plasma by supplying a reaction gas into a discharge space formed between a first electrode and a second electrode, the reaction gas containing hydrogen gas, fluorocarbon gas and inert gas, the first and second electrodes being connected to an RF power supply of an atmospheric pressure plasma generator; and

    approaching the workpiece to the first electrode downstream of a reaction gas flow passing through the discharge space, such that the plasma created in the discharge space is transferred into a space between the first electrode and the workpiece to generate a second atmospheric pressure glow plasma therein, whereby a fluorocarbon coating layer can be formed on the surface of the workpiece.

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